Year 2009
Authors Henry Horng-Shing Lu ,Tu, K. K.-W., Lee, J. C.-s., and Lu, H. H.-S.
Paper Title A Novel Statistical Method for Automatically Partitioning Tools According to Engineers' Tolerance Control in Process Improvement
Journal Title IEEE Transactions on Semiconductor Manufacturing. 22, 3, 373 - 380 (SCI)
Language Chinese
Reference URL http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?isnumber=5191283&arnumber=5159414&count=12&index=5
File
  • A_Novel_Statistical_Method_for_Automatically_Partitioning_Tools_According_to_Engineers_Tolerance_Control_in_Process_Improvement.pdf
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